Product Description
H-Luxe 100 is a versatile system for HHIC treatment for both research and production. The specially designed system comes with a ECR plasma source, enabling efficient surface treatment within seconds with great treatment uniformity. H-Luxe 100 can be operated as a stand-alone system with a treatment area of 500 cm2 or can be easily integrated to an external treatment chamber, such as one with a rotatable sample holder to increase the production throughput. Extremely low consumption of hydrogen makes it an ideal economic solution for advanced surface treatment. H-Luxe 100 also comes with user-friendly software to control and monitor the process.
Key features:
• ECR plasma source
• Large treatment area [500 cm2]
• Integratable to other treatment chamber
• Efficient treatment time [ 60second per 500 cm2]
• Easy integration to different types of vacuum chamber
• Low consumption of hydrogen [< 30 SCCM]
• User friendly software control
